Latest period
$2.51B
YoY change
-17.6%
5Y CAGR
+8.9%
Peak year (2023)
$2.36B
Cumulative CapEx
$19.56B
CapEx history chart for ASML (ASMLF) from 1995 to 2025
Latest: $1.83B
CapEx growth chart for ASML (ASMLF) from 1995 to 2025
Latest: -17.6%
CapEx history table for ASML (ASMLF) from 1995 to 2025
| 2025 | $1.83B | -17.6% | −$391.00M | ||
| 2024 | $2.22B | -6.0% | −$141.51M | ||
| 2023 | $2.36B | +1.8% | +$41.57M | ||
| 2022 | $2.32B | +116.0% | +$1.25B | ||
| 2021 | $1.07B | -9.9% | −$118.41M | ||
| 2020 | $1.19B | -9.5% | −$125.83M | ||
| 2019 | $1.32B | +38.0% | +$362.98M | ||
| 2018 | $956.22M | +126.8% | +$534.67M | ||
| 2017 | $421.56M | +20.4% | +$71.46M | ||
| 2016 | $350.10M | -14.3% | −$58.21M | ||
| 2015 | $408.31M | -53.7% | −$474.08M | ||
| 2014 | $882.38M | +20.4% | +$149.28M | ||
| 2013 | $733.10M | +214.8% | +$500.25M | ||
| 2012 | $232.85M | -56.7% | −$304.68M | ||
| 2011 | $537.52M | +207.6% | +$362.78M | ||
| 2010 | $174.75M | +12.7% | +$19.72M | ||
| 2009 | $155.02M | -54.9% | −$188.47M | ||
| 2008 | $343.49M | +32.2% | +$83.62M | ||
| 2007 | $259.87M | +184.9% | +$168.65M | ||
| 2006 | $91.23M | +5.6% | +$4.88M | ||
| 2005 | $86.35M | -11.3% | −$10.96M | ||
| 2004 | $97.31M | +14.6% | +$12.37M | ||
| 2003 | $84.94M | -38.7% | −$53.68M | ||
| 2002 | $138.62M | -55.5% | −$172.59M | ||
| 2001 | $311.21M | +156.0% | +$189.63M | ||
| 2000 | $121.58M | +3.8% | +$4.50M | ||
| 1999 | $117.08M | +6.4% | +$7.04M | ||
| 1998 | $110.03M | +137.3% | +$63.67M | ||
| 1997 | $46.36M | -5.0% | −$2.45M | ||
| 1996 | $48.81M | +64.0% | +$19.05M | ||
| 1995 | $29.76M | — | — |
- 2025$1.83B-17.6%
- 2024$2.22B-6.0%
- 2023$2.36B+1.8%
- 2022$2.32B+116.0%
- 2021$1.07B-9.9%
- 2020$1.19B-9.5%
- 2019$1.32B+38.0%
- 2018$956.22M+126.8%
- 2017$421.56M+20.4%
- 2016$350.10M-14.3%
- 2015$408.31M-53.7%
- 2014$882.38M+20.4%
- 2013$733.10M+214.8%
- 2012$232.85M-56.7%
- 2011$537.52M+207.6%
- 2010$174.75M+12.7%
- 2009$155.02M-54.9%
- 2008$343.49M+32.2%
- 2007$259.87M+184.9%
- 2006$91.23M+5.6%
- 2005$86.35M-11.3%
- 2004$97.31M+14.6%
- 2003$84.94M-38.7%
- 2002$138.62M-55.5%
- 2001$311.21M+156.0%
- 2000$121.58M+3.8%
- 1999$117.08M+6.4%
- 1998$110.03M+137.3%
- 1997$46.36M-5.0%
- 1996$48.81M+64.0%
- 1995$29.76M—
CapEx values are taken from ASML's reported cash flow statements (interim 6-K and annual 20-F filings with the U.S. Securities and Exchange Commission). Each row shows the period end date and the filing date. YoY compares each figure to the same period one year earlier. Amounts converted to USD using IAS 21 average exchange rates (P&L / cash flow) or closing rates (balance sheet). Originally filed in EUR.
About CapEx at ASML (ASMLF)
According to ASML's latest reported financial statements, the company's current CapEx (TTM) is $2.51B. Capital expenditures (CapEx) are cash outlays for property, plant, and equipment and other long-lived productive assets — reported on the cash flow statement under investing activities. CapEx funds future capacity (factories, data centers, software, machinery), so rising spend can signal investment in growth, while heavy CapEx reduces free cash flow available to shareholders. We display CapEx as a positive amount (the absolute cash outflow); compare with revenue to gauge capital intensity and with total assets for the asset-base context.
Headline TTM above sums the four reported quarters through (reported ). Chart and table below cover the full reported history back to .
The 2025 reading of ASML (ASMLF) CapEx is €1.57B – declined 24.5% year-over-year.
Through 2020–2025 (5 years), ASML CapEx delivered a +9.5% annualised rate; with mixed annual results across the window.
ASML CapEx peaked at €2.21B in 2022; the latest annual figure is €1.57B in 2025 (28.9% below peak).
2022 marks the peak CapEx at €2.21B, with the historical low of €22.15M recorded in 1995.
ASML Capital Expenditures by Year
ASML Capital Expenditures 2025: $1.83B
In 2025, ASML reported CapEx of €1.57B ($1.83B), declined 24.5% below 2024.
ASML Capital Expenditures 2024: $2.22B
ASML CapEx in 2024 was €2.08B ($2.22B), declined 5.1% below 2023.
ASML Capital Expenditures 2023: $2.36B
2023's CapEx for ASML came in at €2.20B ($2.36B), edged down 0.7% below 2022.
ASML Capital Expenditures 2022: $2.32B
ASML posted CapEx of €2.21B ($2.32B) in 2022, surged 135.3% from 2021. This figure represents the highest annual value in the available history.
ASML Capital Expenditures 2021: $1.07B
ASML CapEx in 2021 was €940.30M ($1.07B).
See more financial history for ASML (ASMLF).
Sector peers by CapEx
Technology peers of ASML (ASMLF), ranked by their latest CapEx
| $64.55B | |
| $41.45B | |
| $15.86B | |
| $14.65B | |
| $12.71B | |
| $6.04B | |
| $974.00M | |
| $623.00M |
- $64.55B
- $41.45B
- $15.86B
- $14.65B
- $12.71B
- $6.04B
- $974.00M
- $623.00M
Frequently asked questions
ASML (ASMLF) Key Financials
Charts, filings, and peer comparison for every metric
Explore more
Deep-dives across the income statement, cash flow, capital return, and valuation