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Capital Expenditures for MKS (MKSI)

According to MKS's latest reported financial statements, the company's current capital expenditures (TTM) is $156.00M USD. Capital expenditures (CapEx) are cash outlays for property, plant, and equipment and other long-lived productive assets — reported on the cash flow statement under investing activities. CapEx funds future capacity (factories, data centers, software, machinery), so rising spend can signal investment in growth, while heavy CapEx reduces free cash flow available to shareholders. We display CapEx as a positive amount (the absolute cash outflow); compare with revenue to gauge capital intensity and with total assets for the asset-base context.

Headline TTM above sums the four reported quarters through (reported ). Chart and table below cover the full reported history back to .

MKS Inc. logo
MKS

MKSI

Latest period

$156.00M

YoY change

+25.4%

5Y CAGR

+11.7%

Peak year (2022)

$164.00M

Cumulative capital expenditures

$1.07B

CapEx history chart for MKS (MKSI) from 1998 to 2025

CapEx history table for MKS (MKSI) from 1998 to 2025

Fiscal yearPeriod endedReportedCapital ExpendituresYoYYoY change
2025$148.00M+25.4%+$30.00M
2024$118.00M+35.6%+$31.00M
2023$87.00M-47.0%-$77.00M
2022$164.00M+89.2%+$77.30M
2021$86.70M+2.0%+$1.70M
2020$85.00M+33.0%+$21.10M
2019$63.90M+1.5%+$959,000
2018$62.94M+101.2%+$31.65M
2017$31.29M+63.6%+$12.16M
2016$19.12M+54.0%+$6.71M
2015$12.41M-5.8%-$769,000
2014$13.18M+6.2%+$773,000
2013$12.41M-29.9%-$5.29M
2012$17.70M+13.7%+$2.14M
2011$15.57M-1.6%-$252,000
2010$15.82M+278.5%+$11.64M
2009$4.18M-68.9%-$9.28M
2008$13.46M-10.8%-$1.63M
2007$15.09M+41.2%+$4.40M
2006$10.69M+4.0%+$409,000
2005$10.28M-43.7%-$7.99M
2004$18.27M+187.8%+$11.92M
2003$6.35M-20.1%-$1.60M
2002$7.95M-45.7%-$6.69M
2001$14.64M+33.1%+$3.64M
2000$11.00M+99.9%+$5.50M
1999$5.50M+77.4%+$2.40M
1998$3.10M

CapEx values are taken from MKS's reported cash flow statements (10-Q quarterly and 10-K annual filings with the U.S. Securities and Exchange Commission). Each row shows the period end date and the date the filing was reported; YoY compares each figure to the same period one year earlier. Amounts are in USD as filed.

Analysis

2025's annual capital expenditures for MKS (MKSI) came in at $148.00M – grew 25.4% year-over-year.

MKS capital expenditures compound annual growth for the 2020–2025 (5 years) window is +11.7%, sustaining 2 straight years of year-over-year growth.

MKS capital expenditures declined from $164.00M in 2022 to $148.00M in 2025, a 9.8% drawdown.

Across the available history, capital expenditures reached its high of $164.00M in 2022 and its low of $3.10M in 1998.

MKS (MKSI) sits 9th of 8 Technology peers we track on this metric, against a peer median of $13.68B.

MKS Capital Expenditures by Year

MKS Capital Expenditures 2025: $148.00M

MKS capital expenditures in 2025 was $148.00M, grew 25.4% from 2024.

MKS Capital Expenditures 2024: $118.00M

MKS capital expenditures in 2024 was $118.00M, surged 35.6% from 2023.

MKS Capital Expenditures 2023: $87.00M

MKS capital expenditures in 2023 was $87.00M, plunged 47.0% below 2022.

MKS Capital Expenditures 2022: $164.00M

MKS capital expenditures in 2022 was $164.00M, surged 89.2% from 2021. This figure represents the highest annual value in the available history.

MKS Capital Expenditures 2021: $86.70M

MKS capital expenditures in 2021 was $86.70M.

See more financial history for MKS (MKSI).

Sector peers — CapEx

Companies in the same sector as MKS, ranked by their latest capital expenditures.

CompanyCapital ExpendituresSector
TSMC (TSM)$1.29TTechnology
Microsoft (MSFT)$64.55BTechnology
Micron Technology (MU)$15.86BTechnology
Intel (INTC)$14.65BTechnology
Apple (AAPL)$12.71BTechnology
NVIDIA (NVDA)$6.04BTechnology
AMD (AMD)$974.00MTechnology
Broadcom (AVGO)$623.00MTechnology

Frequently asked questions

What is MKS's capital expenditures?

Latest reported capital expenditures for MKS (MKSI) is $156.00M (period ending March 31, 2026).

How has MKS capital expenditures changed year-over-year?

MKS (MKSI) capital expenditures changed +25.4% year-over-year on the latest annual filing.

What is the long-term growth rate of MKS capital expenditures?

MKS (MKSI) capital expenditures compound annual growth rate is +11.7% over the most recent 5 years available.

When did MKS capital expenditures hit its highest annual value?

MKS capital expenditures reached its highest annual value of $164.00M in 2022.

What was MKS capital expenditures in 2024?

MKS (MKSI) capital expenditures in 2024 was $118.00M.

What was MKS capital expenditures in 2025?

MKS (MKSI) capital expenditures in 2025 was $148.00M.

MKSI Key Financials

Pick a metric for charts, filings and peers — each row shows the latest TTM or most-recent-quarter value.