Capital Expenditures for MKS (MKSI)
According to MKS's latest reported financial statements, the company's current capital expenditures (TTM) is $156.00M USD. Capital expenditures (CapEx) are cash outlays for property, plant, and equipment and other long-lived productive assets — reported on the cash flow statement under investing activities. CapEx funds future capacity (factories, data centers, software, machinery), so rising spend can signal investment in growth, while heavy CapEx reduces free cash flow available to shareholders. We display CapEx as a positive amount (the absolute cash outflow); compare with revenue to gauge capital intensity and with total assets for the asset-base context.
Headline TTM above sums the four reported quarters through (reported ). Chart and table below cover the full reported history back to .

MKSI
Currently viewingCapital ExpendituresSwitch metric
Latest period
$156.00M
YoY change
+25.4%
5Y CAGR
+11.7%
Peak year (2022)
$164.00M
Cumulative capital expenditures
$1.07B
CapEx history chart for MKS (MKSI) from 1998 to 2025
CapEx history table for MKS (MKSI) from 1998 to 2025
| Fiscal year | Period ended | Reported | Capital Expenditures | YoY | YoY change |
|---|---|---|---|---|---|
| 2025 | $148.00M | +25.4% | +$30.00M | ||
| 2024 | $118.00M | +35.6% | +$31.00M | ||
| 2023 | $87.00M | -47.0% | -$77.00M | ||
| 2022 | $164.00M | +89.2% | +$77.30M | ||
| 2021 | $86.70M | +2.0% | +$1.70M | ||
| 2020 | $85.00M | +33.0% | +$21.10M | ||
| 2019 | $63.90M | +1.5% | +$959,000 | ||
| 2018 | $62.94M | +101.2% | +$31.65M | ||
| 2017 | $31.29M | +63.6% | +$12.16M | ||
| 2016 | $19.12M | +54.0% | +$6.71M | ||
| 2015 | $12.41M | -5.8% | -$769,000 | ||
| 2014 | $13.18M | +6.2% | +$773,000 | ||
| 2013 | $12.41M | -29.9% | -$5.29M | ||
| 2012 | $17.70M | +13.7% | +$2.14M | ||
| 2011 | $15.57M | -1.6% | -$252,000 | ||
| 2010 | $15.82M | +278.5% | +$11.64M | ||
| 2009 | $4.18M | -68.9% | -$9.28M | ||
| 2008 | $13.46M | -10.8% | -$1.63M | ||
| 2007 | $15.09M | +41.2% | +$4.40M | ||
| 2006 | $10.69M | +4.0% | +$409,000 | ||
| 2005 | $10.28M | -43.7% | -$7.99M | ||
| 2004 | $18.27M | +187.8% | +$11.92M | ||
| 2003 | $6.35M | -20.1% | -$1.60M | ||
| 2002 | $7.95M | -45.7% | -$6.69M | ||
| 2001 | $14.64M | +33.1% | +$3.64M | ||
| 2000 | $11.00M | +99.9% | +$5.50M | ||
| 1999 | $5.50M | +77.4% | +$2.40M | ||
| 1998 | $3.10M | — | — |
CapEx values are taken from MKS's reported cash flow statements (10-Q quarterly and 10-K annual filings with the U.S. Securities and Exchange Commission). Each row shows the period end date and the date the filing was reported; YoY compares each figure to the same period one year earlier. Amounts are in USD as filed.
Analysis
2025's annual capital expenditures for MKS (MKSI) came in at $148.00M – grew 25.4% year-over-year.
MKS capital expenditures compound annual growth for the 2020–2025 (5 years) window is +11.7%, sustaining 2 straight years of year-over-year growth.
MKS capital expenditures declined from $164.00M in 2022 to $148.00M in 2025, a 9.8% drawdown.
Across the available history, capital expenditures reached its high of $164.00M in 2022 and its low of $3.10M in 1998.
MKS (MKSI) sits 9th of 8 Technology peers we track on this metric, against a peer median of $13.68B.
MKS Capital Expenditures by Year
MKS Capital Expenditures 2025: $148.00M
MKS capital expenditures in 2025 was $148.00M, grew 25.4% from 2024.
MKS Capital Expenditures 2024: $118.00M
MKS capital expenditures in 2024 was $118.00M, surged 35.6% from 2023.
MKS Capital Expenditures 2023: $87.00M
MKS capital expenditures in 2023 was $87.00M, plunged 47.0% below 2022.
MKS Capital Expenditures 2022: $164.00M
MKS capital expenditures in 2022 was $164.00M, surged 89.2% from 2021. This figure represents the highest annual value in the available history.
MKS Capital Expenditures 2021: $86.70M
MKS capital expenditures in 2021 was $86.70M.
See more financial history for MKS (MKSI).
Sector peers — CapEx
Companies in the same sector as MKS, ranked by their latest capital expenditures.
| Company | Capital Expenditures | Sector |
|---|---|---|
| TSMC (TSM) | $1.29T | Technology |
| Microsoft (MSFT) | $64.55B | Technology |
| Micron Technology (MU) | $15.86B | Technology |
| Intel (INTC) | $14.65B | Technology |
| Apple (AAPL) | $12.71B | Technology |
| NVIDIA (NVDA) | $6.04B | Technology |
| AMD (AMD) | $974.00M | Technology |
| Broadcom (AVGO) | $623.00M | Technology |
Frequently asked questions
What is MKS's capital expenditures?
Latest reported capital expenditures for MKS (MKSI) is $156.00M (period ending March 31, 2026).
How has MKS capital expenditures changed year-over-year?
MKS (MKSI) capital expenditures changed +25.4% year-over-year on the latest annual filing.
What is the long-term growth rate of MKS capital expenditures?
MKS (MKSI) capital expenditures compound annual growth rate is +11.7% over the most recent 5 years available.
When did MKS capital expenditures hit its highest annual value?
MKS capital expenditures reached its highest annual value of $164.00M in 2022.
What was MKS capital expenditures in 2024?
MKS (MKSI) capital expenditures in 2024 was $118.00M.
What was MKS capital expenditures in 2025?
MKS (MKSI) capital expenditures in 2025 was $148.00M.
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