Latest period
$156.00M
YoY change
+25.4%
5Y CAGR
+11.7%
Peak year (2022)
$164.00M
Cumulative CapEx
$1.10B
CapEx history chart for MKS (MKSI) from 1998 to 2025
Latest: $148.00M
CapEx growth chart for MKS (MKSI) from 1998 to 2025
Latest: +25.4%
CapEx history table for MKS (MKSI) from 1998 to 2025
| 2025 | $148.00M | +25.4% | +$30.00M | ||
| 2024 | $118.00M | +35.6% | +$31.00M | ||
| 2023 | $87.00M | -47.0% | −$77.00M | ||
| 2022 | $164.00M | +89.2% | +$77.30M | ||
| 2021 | $86.70M | +2.0% | +$1.70M | ||
| 2020 | $85.00M | +33.0% | +$21.10M | ||
| 2019 | $63.90M | +1.5% | +$959.00K | ||
| 2018 | $62.94M | +101.2% | +$31.65M | ||
| 2017 | $31.29M | +63.6% | +$12.16M | ||
| 2016 | $19.12M | +54.0% | +$6.71M | ||
| 2015 | $12.41M | -5.8% | −$769.00K | ||
| 2014 | $13.18M | +6.2% | +$773.00K | ||
| 2013 | $12.41M | -29.9% | −$5.29M | ||
| 2012 | $17.70M | +13.7% | +$2.14M | ||
| 2011 | $15.57M | -1.6% | −$252.00K | ||
| 2010 | $15.82M | +278.5% | +$11.64M | ||
| 2009 | $4.18M | -68.9% | −$9.28M | ||
| 2008 | $13.46M | -10.8% | −$1.63M | ||
| 2007 | $15.09M | +41.2% | +$4.40M | ||
| 2006 | $10.69M | +4.0% | +$409.00K | ||
| 2005 | $10.28M | -43.7% | −$7.99M | ||
| 2004 | $18.27M | +187.8% | +$11.92M | ||
| 2003 | $6.35M | -20.1% | −$1.60M | ||
| 2002 | $7.95M | -45.7% | −$6.69M | ||
| 2001 | $14.64M | +33.1% | +$3.64M | ||
| 2000 | $11.00M | +99.9% | +$5.50M | ||
| 1999 | $5.50M | +77.4% | +$2.40M | ||
| 1998 | $3.10M | — | — |
- 2025$148.00M+25.4%
- 2024$118.00M+35.6%
- 2023$87.00M-47.0%
- 2022$164.00M+89.2%
- 2021$86.70M+2.0%
- 2020$85.00M+33.0%
- 2019$63.90M+1.5%
- 2018$62.94M+101.2%
- 2017$31.29M+63.6%
- 2016$19.12M+54.0%
- 2015$12.41M-5.8%
- 2014$13.18M+6.2%
- 2013$12.41M-29.9%
- 2012$17.70M+13.7%
- 2011$15.57M-1.6%
- 2010$15.82M+278.5%
- 2009$4.18M-68.9%
- 2008$13.46M-10.8%
- 2007$15.09M+41.2%
- 2006$10.69M+4.0%
- 2005$10.28M-43.7%
- 2004$18.27M+187.8%
- 2003$6.35M-20.1%
- 2002$7.95M-45.7%
- 2001$14.64M+33.1%
- 2000$11.00M+99.9%
- 1999$5.50M+77.4%
- 1998$3.10M—
CapEx values are taken from MKS's reported cash flow statements (quarterly 10-Q and annual 10-K filings with the U.S. Securities and Exchange Commission). Each row shows the period end date and the filing date. YoY compares each figure to the same period one year earlier. Amounts are in USD as filed.
About CapEx at MKS (MKSI)
According to MKS's latest reported financial statements, the company's current CapEx (TTM) is $156.00M. Capital expenditures (CapEx) are cash outlays for property, plant, and equipment and other long-lived productive assets — reported on the cash flow statement under investing activities. CapEx funds future capacity (factories, data centers, software, machinery), so rising spend can signal investment in growth, while heavy CapEx reduces free cash flow available to shareholders. We display CapEx as a positive amount (the absolute cash outflow); compare with revenue to gauge capital intensity and with total assets for the asset-base context.
Headline TTM above sums the four reported quarters through (reported ). Chart and table below cover the full reported history back to .
2025's annual CapEx for MKS (MKSI) came in at $148.00M – grew 25.4% year-over-year.
MKS CapEx compound annual growth for the 2020–2025 (5 years) window is +11.7%, sustaining 2 straight years of year-over-year growth.
MKS CapEx declined from $164.00M in 2022 to $148.00M in 2025, a 9.8% drawdown.
Across the available history, CapEx reached its high of $164.00M in 2022 and its low of $3.10M in 1998.
MKS Capital Expenditures by Year
MKS Capital Expenditures 2025: $148.00M
In 2025, MKS reported CapEx of $148.00M, grew 25.4% from 2024.
MKS Capital Expenditures 2024: $118.00M
MKS CapEx in 2024 was $118.00M, surged 35.6% from 2023.
MKS Capital Expenditures 2023: $87.00M
2023's CapEx for MKS came in at $87.00M, plunged 47.0% below 2022.
MKS Capital Expenditures 2022: $164.00M
MKS posted CapEx of $164.00M in 2022, surged 89.2% from 2021. This figure represents the highest annual value in the available history.
MKS Capital Expenditures 2021: $86.70M
MKS CapEx in 2021 was $86.70M.
See more financial history for MKS (MKSI).
Sector peers by CapEx
Technology peers of MKS (MKSI), ranked by their latest CapEx
| $64.55B | |
| $41.45B | |
| $15.86B | |
| $12.71B | |
| $6.04B | |
| $1.76B | |
| $974.00M | |
| $623.00M |
- $64.55B
- $41.45B
- $15.86B
- $12.71B
- $6.04B
- $1.76B
- $974.00M
- $623.00M
Frequently asked questions
MKS (MKSI) Key Financials
Charts, filings, and peer comparison for every metric
Explore more
Deep-dives across the income statement, cash flow, capital return, and valuation