Latest period
$2.47B
YoY change
-23.6%
5Y CAGR
+10.5%
Peak year (2024)
$2.30B
Cumulative CapEx
$16.51B
CapEx history chart for ASML (ASML) from 1995 to 2025
Latest: $1.76B
CapEx growth chart for ASML (ASML) from 1995 to 2025
Latest: -23.6%
CapEx history table for ASML (ASML) from 1995 to 2025
| 2025 | $1.76B | -23.6% | −$543.99M | ||
| 2024 | $2.30B | +1.1% | +$24.38M | ||
| 2023 | $2.28B | +78.2% | +$1.00B | ||
| 2022 | $1.28B | +19.2% | +$205.82M | ||
| 2021 | $1.07B | +0.6% | +$5.99M | ||
| 2020 | $1.07B | +27.6% | +$230.72M | ||
| 2019 | $836.71M | +23.7% | +$160.44M | ||
| 2018 | $676.27M | +75.9% | +$291.70M | ||
| 2017 | $384.57M | +7.0% | +$25.03M | ||
| 2016 | $359.54M | -13.2% | −$54.75M | ||
| 2015 | $414.29M | -9.6% | −$44.24M | ||
| 2014 | $458.53M | +59.8% | +$171.53M | ||
| 2013 | $287.00M | +32.1% | +$69.70M | ||
| 2012 | $217.30M | -50.1% | −$217.84M | ||
| 2011 | $435.14M | +149.6% | +$260.80M | ||
| 2010 | $174.34M | +16.0% | +$24.06M | ||
| 2009 | $150.28M | -56.7% | −$196.51M | ||
| 2008 | $346.78M | +42.5% | +$103.51M | ||
| 2007 | $243.27M | +175.7% | +$155.03M | ||
| 2006 | $88.25M | -2.6% | −$2.39M | ||
| 2005 | $90.64M | +1.9% | +$1.66M | ||
| 2004 | $88.98M | +4.8% | +$4.05M | ||
| 2003 | $84.94M | -38.7% | −$53.68M | ||
| 2002 | $138.62M | -55.5% | −$172.59M | ||
| 2001 | $311.21M | +166.5% | +$194.42M | ||
| 2000 | $116.79M | +1.9% | +$2.18M | ||
| 1999 | $114.61M | +4.2% | +$4.57M | ||
| 1998 | $110.03M | +137.3% | +$63.67M | ||
| 1997 | $46.36M | -5.0% | −$2.45M | ||
| 1996 | $48.81M | +64.0% | +$19.05M | ||
| 1995 | $29.76M | — | — |
- 2025$1.76B-23.6%
- 2024$2.30B+1.1%
- 2023$2.28B+78.2%
- 2022$1.28B+19.2%
- 2021$1.07B+0.6%
- 2020$1.07B+27.6%
- 2019$836.71M+23.7%
- 2018$676.27M+75.9%
- 2017$384.57M+7.0%
- 2016$359.54M-13.2%
- 2015$414.29M-9.6%
- 2014$458.53M+59.8%
- 2013$287.00M+32.1%
- 2012$217.30M-50.1%
- 2011$435.14M+149.6%
- 2010$174.34M+16.0%
- 2009$150.28M-56.7%
- 2008$346.78M+42.5%
- 2007$243.27M+175.7%
- 2006$88.25M-2.6%
- 2005$90.64M+1.9%
- 2004$88.98M+4.8%
- 2003$84.94M-38.7%
- 2002$138.62M-55.5%
- 2001$311.21M+166.5%
- 2000$116.79M+1.9%
- 1999$114.61M+4.2%
- 1998$110.03M+137.3%
- 1997$46.36M-5.0%
- 1996$48.81M+64.0%
- 1995$29.76M—
CapEx values are taken from ASML's reported cash flow statements (quarterly 10-Q and annual 10-K filings with the U.S. Securities and Exchange Commission). Each row shows the period end date and the filing date. YoY compares each figure to the same period one year earlier. Amounts converted to USD using IAS 21 average exchange rates (P&L / cash flow) or closing rates (balance sheet). Originally filed in EUR.
About CapEx at ASML (ASML)
According to ASML's latest reported financial statements, the company's current CapEx (TTM) is $2.47B. Capital expenditures (CapEx) are cash outlays for property, plant, and equipment and other long-lived productive assets — reported on the cash flow statement under investing activities. CapEx funds future capacity (factories, data centers, software, machinery), so rising spend can signal investment in growth, while heavy CapEx reduces free cash flow available to shareholders. We display CapEx as a positive amount (the absolute cash outflow); compare with revenue to gauge capital intensity and with total assets for the asset-base context.
Headline TTM above sums the four reported quarters through (reported ). Chart and table below cover the full reported history back to .
As of the 2025 fiscal year, ASML (ASML) reported CapEx of €1.51B – plunged 30.0% year-over-year.
Over 2020–2025 (5 years), ASML CapEx expanded at a +11.0% compound annual rate, with mixed annual results across the window.
ASML CapEx plunged from €2.16B in 2024 to €1.51B in 2025, a 30.0% drawdown.
€2.16B stands as the all-time-high annual CapEx, posted in 2024, against a low of €22.15M during 1995.
ASML Capital Expenditures by Year
ASML Capital Expenditures 2025: $1.76B
In 2025, ASML reported CapEx of €1.51B ($1.76B), plunged 30.0% below 2024.
ASML Capital Expenditures 2024: $2.30B
ASML CapEx in 2024 was €2.16B ($2.30B), edged up 2.0% from 2023. This figure represents the highest annual value in the available history.
ASML Capital Expenditures 2023: $2.28B
2023's CapEx for ASML came in at €2.12B ($2.28B), surged 69.2% from 2022.
ASML Capital Expenditures 2022: $1.28B
ASML posted CapEx of €1.25B ($1.28B) in 2022, surged 33.3% from 2021.
ASML Capital Expenditures 2021: $1.07B
ASML CapEx in 2021 was €938.94M ($1.07B).
See more financial history for ASML (ASML).
Sector peers by CapEx
Technology peers of ASML (ASML), ranked by their latest CapEx
| $64.55B | |
| $41.45B | |
| $15.86B | |
| $14.65B | |
| $12.71B | |
| $6.04B | |
| $974.00M | |
| $623.00M |
- $64.55B
- $41.45B
- $15.86B
- $14.65B
- $12.71B
- $6.04B
- $974.00M
- $623.00M
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